Electron collisions with the CF3radical using theR-matrix method
نویسندگان
چکیده
منابع مشابه
Electron collisions with CF radicals using the R-matrix method
Radicals CF (x=1-3) are formed in the upper atmosphere by photolysis of fluorocarbons the bulk of which are generated in the plasma industry. Fluorocarbon plasmas are used in plasma etching technology and surface modification of materials. Many of the processes that occur in these plasmas are poorly characterized and understood, providing a significant roadblock for the construction of reliable...
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ژورنال
عنوان ژورنال: New Journal of Physics
سال: 2003
ISSN: 1367-2630
DOI: 10.1088/1367-2630/5/1/155